Self-organized metallic nanoparticle and nanowire arrays from ion-sputtered silicon templates
Self-organized metallic nanoparticle and nanowire arrays from ion-sputtered silicon templates
Oates, T. W. H.; Keller, A.; Noda, S.; Facsko, S.
Abstract
We demonstrate a production method for self-organized arrays of metal nanoparticles and aligned nanowires. Ion beam-sputtered Si/SiO2 substrates are used as templates for metallic vapor deposition, forming aligned arrays of 5–20 nm silver and cobalt nanoparticles with a period of 35 nm. The 20 nm diameter cobalt nanowires with lengths in excess of a micrometer are produced under appropriate conditions. All processing steps can be integrated into a single vacuum chamber and performed in a matter of minutes at mild temperatures. This inherently scalable technique can be extended to a range of substrate materials, array patterns, and nanoparticle materials.
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Applied Physics Letters 93(2008), 063106
DOI: 10.1063/1.2959080
Cited 70 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-11642