Fundamentals and Modelling of Reactive Magnetron Sputtering

Fundamentals and Modelling of Reactive Magnetron Sputtering

Moeller, W.

Abstract

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  • Eingeladener Vortrag (Konferenzbeitrag)
    Tutorial "Fundamentals and Trends of Plasma Surface Processing", 14.09.2008, Garmisch-Partenkirchen, Germany

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