Fundamentals of Ion Beam Synthesis of Nanostructures
Fundamentals of Ion Beam Synthesis of Nanostructures
Heinig, K.-H.
Abstract
Fundamentals of ion-beam-solid-interactions will be presented. An overview over ion implantation techniques will be given. Range profile calculations, defect creation processes as well as annealing method will be treated. Finally, methods of ion beam synthesis based on phase separation of implanted species will be discussed.
Keywords: ion implantation; ion beam synthesis; kinetic Monte Carlo simulation; TRIM; lecture
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Eingeladener Vortrag (Konferenzbeitrag)
Winter School on Nanoelectronic and Nanophotonics, 19.-25.01.2009, Ankara, Turkey
Permalink: https://www.hzdr.de/publications/Publ-12195