Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

The measurement of sputtering yields for Carbon and angular distributions of sputtered C-particles is often hindered by hydrocarbon contaminations at the sample surface. In order to overcome this problem, 13C-enriched samples can be used, provided a 13C-sensitive detection method is available. For sputtering yield determination we have measured the thickness decrease of a thin 13C-layer on Si by ERDA, where 12C and 13C can be separated by their kinematic energy difference. A pre-condition is an energy resolution below 1%, which makes a position sensitive detector for kinematic correction of different recoil an-gles necessary. A high energy resolution and sensitivity is required, if sputtered 13C-particles have to be detected on a catcher foil to determine the angular distribution, as sputtered 13C and contamination 12C particles are of the same order. Our ERDA-detector fulfills this requirement having a solid angle of 6.2 msr and 2-dim position sensitivity. The result of the catcher analysis is compared to TOF-SIMS with very high mass resolution and NRA using 13C(p,gamma) or 13C(d,p)-reactions. With these techniques, a new attempt has been made to measure the energy distribution of sputtered particles by covering the sputter target with very thin layers of 13C.