Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

16 Publikationen

Ion Beam Analysis in a Helium Ion Microscope

Klingner, N.; Heller, R.; Hlawacek, G.; Facsko, S.; von Borany, J.

Abstract

Helium ion microscopes (HIM) have become powerful imaging devices within the last decade. Their enormous lateral resolution of below 0.3 nm and the highest field of depth make them a unique tool in surface imaging. So far the possibilities to identify target materials (elements) are rather limited.
In the present contribution we will show concepts as well as preliminary studies on the capability, efficiency and the limits of applying (Rutherford) Backscattering Spectrometry (RBS) within a HIM device to image samples with target mass contrast and to analyze target compositions.
We will present different concepts of how to realize RBS in a HIM and point out mayor challenges and physical limitation.

Keywords: Helium Ion Microscope

Beteiligte Forschungsanlagen

Verknüpfte Publikationen

  • Poster
    AVS 61st International Symposium & Exhibition, 09.-14.11.2014, Baltimore, United States of America
  • Poster
    19th International Conference on Ion Beam Modification of Materials, 14.-19.09.2014, Leuven, Belgium
  • Vortrag (Konferenzbeitrag)
    Ionenstrahlen & Nanostrukturen, 20.-22.07.2014, Paderborn, Deutschland
  • Vortrag (Konferenzbeitrag)
    Ionenstrahlen in Forschung und Anwendung, 13.-14.06.2013, Leipzig, Deutschland
  • Poster
    79. Jahrestagung der DPG und DPG-Frühjahrstagung, 18.03.2015, Berlin, Deutschland
  • Eingeladener Vortrag (Konferenzbeitrag)
    ZEISS ORION User Meeting, 15.04.2015, Empoli, Italy
  • Poster
    3rd Dresden Nanoanalysis Symposium, 17.04.2015, Dresden, Deutschland
  • Sonstiger Vortrag
    PhD Seminar, 31.08.2015, Dresden, Deutschland
  • Sonstiger Vortrag
    Zeiss Meeting, 27.01.2015, Dresden, Deutschland
  • Sonstiger Vortrag
    Meeting at Ion Microscopy Innovation Center at Carl Zeiss Microscopy LLC, 20.11.2014, Peabody, United States of America
  • Sonstiger Vortrag
    Group Meeting at Rutgers University, 19.11.2014, Rutgers, United States of America
  • Poster
    9th PhD seminar, Altenberg, 26.09.2014, Altenberg, Deutschland
  • Sonstiger Vortrag
    FWI Internal Meeting, 14.06.2014, Weinböhla, Deutschland
  • Sonstiger Vortrag
    8th PhD Seminar, 08.10.2013, Bautzen, Deutschland
  • Sonstiger Vortrag
    Annual FWI PhD Seminar, 02.09.2013, Dresden, Deutschland
  • Sonstiger Vortrag
    Internal FWI Meeting "Statusklausur", 10.07.2013, Dresden, Deutschland

Permalink: https://www.hzdr.de/publications/Publ-21458