In situ characterization of cubic boron nitride film growth in the IR spectral region
In situ characterization of cubic boron nitride film growth in the IR spectral region
Barth, K. L.; Fukarek, W.; Maucher, H. P.; Plass, M. F.; Lunk, A.
- Thin Solid Films 313-314 (1998) 697
Permalink: https://www.hzdr.de/publications/Publ-2146