Engineering for NEMS with ion beams & flash annealing
Engineering for NEMS with ion beams & flash annealing
Skorupa, W.
Abstract
Engineering for NEMS with ion beams & flash annealing will be presented based on recent results of the Rossendorf group working for Semiconductor Materials Modification by Ion Beams.
Keywords: NEMS; ion implantation; flash annealing
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 23390) publication
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Eingeladener Vortrag (Konferenzbeitrag)
Workshop on Ion Implantation - improving the MEMS processes?, 03.03.2016, Erfurt, Germany
Permalink: https://www.hzdr.de/publications/Publ-23390
