Ion implantation of Ge in Si, characterization in Si1-xGex structures
Ion implantation of Ge in Si, characterization in Si1-xGex structures
Ganetsos, T.; Mair, G. L. R.; Teichert, J.; Bischoff, L.; Aidinis, C.
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Vortrag (Konferenzbeitrag)
XIIIrd Greek Conf. in Solid State Physics, Thessaloninki, Greece, Sept. 1997
Permalink: https://www.hzdr.de/publications/Publ-2390