Implantation in 3D-objects using plasma immersion ion implantation
Implantation in 3D-objects using plasma immersion ion implantation
Mändl, S.; Günzel, R.; Möller, W.
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Vortrag (Konferenzbeitrag)
Spring Meeting, German Physical Society, Münster, Germany, March 17 21, 1997
Permalink: https://www.hzdr.de/publications/Publ-2421