X-ray high resolution diffraction and reflectivity studies of the mechanical treatment related defects in opi-ready wafers
X-ray high resolution diffraction and reflectivity studies of the mechanical treatment related defects in opi-ready wafers
Mazur, K.; Sass, J.; Eichhorn, F.
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Vortrag (Konferenzbeitrag)
3th Autumn School on "X-ray scattering from surfaces and thin layers", Smolenice, Slovakia, Oct. 1 - 4, 1997
Permalink: https://www.hzdr.de/publications/Publ-2426