Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationModeling of implantation damage in silicon
Posselt, M.
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Eingeladener Vortrag (Konferenzbeitrag)
Int. Workshop on Challenges in Predictive Process Simulation (ChiPPS'97), Wandlitz, Germany, Aug. 17 - 20, 1997 (invited lecture)
Permalink: https://www.hzdr.de/publications/Publ-2448