A comparative study of ERDA, EELS and XPS for structural analysis of amorphous carbon nitride films
A comparative study of ERDA, EELS and XPS for structural analysis of amorphous carbon nitride films
Späth, C.; Kühn, M.; Richter, F.; Falke, U.; Hietschold, M.; Kilper, R.; Kreißig, U.
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Vortrag (Konferenzbeitrag)
Int. Conf. Diamond '97
Permalink: https://www.hzdr.de/publications/Publ-2470