Boron Liquid Metal Alloy Ion Sources for Special FIB Applications
Boron Liquid Metal Alloy Ion Sources for Special FIB Applications
Bischoff, L.; Klingner, N.; Mazarov, P.; Pilz, W.; Meyer, F.
Abstract
Focused Ion Beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the µm-scale and below. Liquid Metal Alloy Ion Sources (LMAIS) represent an alternative to expand the FIB application fields beside all other source concepts. The need of light elements like B was investigated using various alloys. A promising solution was found in a Co31Nd64B5 based LMAIS which should be introduced in more detail. Beside Co ions as a ferromagnetic element and the rare earth element Nd especially B is interesting for special FIB applications with a best obtained resolution of about 30 nm so far.
Keywords: Boron Liquid Metal Alloy Ion Source; Focused Ion Beam
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 30640) publication
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Journal of Vacuum Science & Technology B 38(2020)4, 042801-1-042801-5
DOI: 10.1116/6.0000073
Cited 6 times in Scopus
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Permalink: https://www.hzdr.de/publications/Publ-30640