Double SIMOX Structures Formed by Sequential High Energy Oxygen Implantation into Silicon
Double SIMOX Structures Formed by Sequential High Energy Oxygen Implantation into Silicon
Hatzopoulos, N.; Skorupa, W.; Siapkas, D. I.
- Journal of the Electrochemical Society Vol. 147, No. 1,(2000), pp. 354
Permalink: https://www.hzdr.de/publications/Publ-3273