Defects remaining in Si after MeV ion implantation and annealing away from the peak of the nuclear energy deposition profile
Defects remaining in Si after MeV ion implantation and annealing away from the peak of the nuclear energy deposition profile
Kögler, R.; Skorupa, W.; Yankov, R. A.; Posselt, M.; Danilin, A. B.
Abstract
Informations can be requested. Email: M.Posselt@fz-rossendorf.de
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Beitrag zu fremdem Sammelwerk
Proc. 1998 Int. Conf. on Ion Implantation Technology, Kyoto, Japan, June 22-26, 1998, eds.: J. Matsuo, G. Takaoka, Y. Yamada; IEEE, Piscataway, USA, 1998, IEEE Publications 98EX144, p. 1117
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