Applications of unconventional focused ion beams in quantum and semiconductor technology
Applications of unconventional focused ion beams in quantum and semiconductor technology
Abstract
Applications of unconventional focused ion beams in
quantum and semiconductor technology
Keywords: FIB
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 38688) publication
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Sonstiger Vortrag
Institutsseminar, 10.05.2023, Leipzig, Deutschland
Permalink: https://www.hzdr.de/publications/Publ-38688
