Features of structure formation of TiN coatings obtained by plasma immersion ion implantation assisted deposition

Features of structure formation of TiN coatings obtained by plasma immersion ion implantation assisted deposition

Shevchenko, N.; Rogozin, A.; Matz, W.; Günzel, R.

• Vortrag (Konferenzbeitrag)
  Proc. 6th Int. Conf. on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, Russia, Sept. 23-28, 2002, pp. 540-543
• Beitrag zu fremdem Sammelwerk
  Proc. 6th Int. Conf. on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, Russia, Sept. 23-28, 2002, pp. 540-543

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