Plasma Immersion Ion Implantation Under Industrially Relevant Conditions

Plasma Immersion Ion Implantation Under Industrially Relevant Conditions

Ueda, M.; Wei, R.; Reuther, H.

Abstract

Plasma Immersion Ion Implantation Under Industrially Relevant Conditions

Eingeladener Vortrag (Konferenzbeitrag)
The Second International Workshop on Particle Beams &Plasma Interaction on Material and, 25.11.2004, Chiang Mai, Thailand

Permalink: https://www.hzdr.de/publications/Publ-6970