Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationInfluence of the plasma density on the performance of plasma immersion íon implantation of silicon surface
Castro, R. M.; Ueda, M.; Oliveira, R. M.; Reuther, H.; Morena, B. L. D.
Abstract
Influence of the plasma density on the performance of plasma immersion íon implantation of silicon surface
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Vortrag (Konferenzbeitrag)
8th Brazilian Meeting of Plasma Physics, 27.-30.11.2005, Niteroi, Rio de Janeiro, Brazil
Permalink: https://www.hzdr.de/publications/Publ-7890