Observation of the growth and microstructural development of MAX phase Ti₂AlN thin films during magnetron sputtering using synchrotron radiation

Observation of the growth and microstructural development of MAX phase Ti₂AlN thin films during magnetron sputtering using synchrotron radiation

Schell, N.; Beckers, M.; Martins, R. M. S.; Mücklich, A.; Möller, W.

• Vortrag (Konferenzbeitrag)
  AVS 52nd International Symposium & Exhibition, 30.10.-04.11.2005, Boston, USA

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