Publications Repository - Helmholtz-Zentrum Dresden-Rossendorf
1 PublicationBonding environment in films deposited from Ar/CH4 and Ar/CH4/N2 ECR discharge: effect of voltage polarization on the growth process
Camero, M.; Gago, R.; Gómez-Aleixandre, C.; Albella, J. M.
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Poster
PSE2004, 13.-17.09.2004, Garmisch-Partenkirchen, Germany
Permalink: https://www.hzdr.de/publications/Publ-9822