Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Combined application of multiple ion energies for simultaneous growth and stress relaxation at thin film deposition

Kolitsch, A.; Abendroth, B.; Gago, R.; Fitz, R.; Möller, W.

• Eingeladener Vortrag (Konferenzbeitrag)
  ECAART-8 2004, 8th European Conference on Accelerators in Applied Research and Technology, 20.-24.09.2004, Paris, France

Permalink: https://www.hzdr.de/publications/Publ-9824