Fundamentals and applications of ellipsometry
Fundamentals and applications of ellipsometry
Vinnichenko, M.
Abstract
The short tutorial on fundamentals and applications of spectroscopic ellipsometry was given. The sensitivity of the technique in different configurations, problems of data acquisition and analysis have been addressed.
Keywords: Spectroscopic elipsometry
-
Sonstiger Vortrag
Informal seminar at Centro de Micro-Analisis de Materiales (CMAM), 29.06.2007, Madrid, Spain
Permalink: https://www.hzdr.de/publications/Publ-10316
