Silicon-based MOS light emitters using rare earth implantation
Silicon-based MOS light emitters using rare earth implantation
Skorupa, W.
Abstract
An overview on recent results regarding ion beam processing for silicon-based light emission using rare earths is presented
Keywords: rare earths; ion implantation; silicon-based light emission
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Eingeladener Vortrag (Konferenzbeitrag)
Silicon to Light & Light to Silicon - Materials, Characterisation and Applications, 09.-10.07.2007, Halle, Germany
Permalink: https://www.hzdr.de/publications/Publ-10514
