Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationHydrogen determination by means of the 1H(19F,α y) 16O and 1H(15N,α y) 12C resonance reactions
Rudolph, W.; Bauer, C.; Gippner, P.; Grambole, D.; Heiser, C.; Herrmann, F.; Thomas, H.-J.
Abstract
Hydrogen surface contamination and depth profiles can be measured by the resonant nuclear reactions 1H(19F,α y) 16O and 1H(15N,α y) 12C. The method was applied to study hydrogen-implanted silicon, amorphous silicon layers and silicon oxide films produced by anodic oxidation.
- Journal of Radioanalytical and Nuclear Chemistry 83(1984)1, 99-105
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