Rare-earth plasma extreme ultraviolet sources at 6.5-6.7 nm
Rare-earth plasma extreme ultraviolet sources at 6.5-6.7 nm
Otsuka, T.; Kilbane, D.; White, J.; Higashiguchi, T.; Yugami, N.; Yatagai, T.; Jiang, W.; Endo, A.; Dunne, P.; O'Sullivan, G.
Abstract
We have demonstrated a laser-produced plasma extreme ultraviolet source operating in the 6.5-6.7 nm region based on rare-earth targets of Gd and Tb coupled with a Mo/B4C multilayer mirror. Multiply charged ions produce strong resonance emission lines, which combine to yield an intense unresolved transition array. The spectra of these resonant lines around 6.7 nm (in-band: 6.7 nm +/-1%) suggest that the in-band emission increases with increased plasma volume by suppressing the plasma hydrodynamic expansion loss at an electron temperature of about 50 eV, resulting in maximized emission.
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Applied Physics Letters 97(2010), 111503
DOI: 10.1063/1.3490704
Cited 83 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-16343