Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationStrain Relaxation and Vacancy Creation in Thin Platinum Films
Gruber, W.; Chakravarty, S.; Baehtz, C.; Leitenberger, W.; Bruns, M.; Kobler, A.; Kübel, C.; Schmidt, H.
Abstract
Synchrotron based combined in situ x-ray diffractometry and reflectometry is used to investigate the role of vacancies for the relaxation of residual stress in thin metallic Pt films. From the experimentally determined relative changes of the lattice parameter a and of the film thickness L the modification of vacancy concentration and residual strain was derived as a function of annealing time at 130 °C. The results indicate that relaxation of strain resulting from compressive stress is accompanied by the creation of vacancies at the free film surface. This proves experimentally the postulated dominant role of vacancies for stress relaxation in thin metal films close to room temperature.
Keywords: Synchrotron radiation; Pt thin films; reflectometry
Beteiligte Forschungsanlagen
- Rossendorf Beamline an der ESRF DOI: 10.1107/S1600577520014265
Verknüpfte Publikationen
- DOI: 10.1107/S1600577520014265 is cited by this (Id 16465) publication
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Physical Review Letters 107(2011)26, 265501-265506
DOI: 10.1103/PhysRevLett.107.265501
Cited 27 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-16465