X-ray absorption near-edge structure of hexagonal ternary phases in sputter-deposited TiAlN films
X-ray absorption near-edge structure of hexagonal ternary phases in sputter-deposited TiAlN films
Gago, R.; Soldera, F.; Hübner, R.; Lehmann, J.; Munnik, F.; Vázquez, L.; Redondo-Cubero, A.; Endrino, J. L.
Abstract
Titanium aluminium nitride (TiAlN) coatings have been grown by reactive (Ar/N2) direct-current magnetron sputtering from a Ti50Al50 compound target. The film composition has been quantified by ion beam analysis showing the formation of Al-rich nitrides (Ti/Al~0.3), with stoichiometric films for N2 contents in the gas mixture equal or above ~25%. The surface morphology of the films has been imaged by atomic force microscopy, showing very smooth surfaces with roughness values below 2 nm. X-ray and electron diffraction patterns reveal that the films are nanocrystalline with a wurzite (w) structure of lattice parameters larger (~2.5%) than those for w-AlN. The lattice expansion correlates with the Ti/Al ratio in stoichiometric films, which suggests the incorporation of Ti into w-AlN. The atomic environments around Ti, Al and N sites have been extracted from the X-ray absorption near-edge structure (XANES) around Ti2p, Al1s and N1s edges, respectively. The analysis of the XANES spectral lineshape and comparison with reported theoretical calculations confirm the formation of a ternary hexagonal phase.
Keywords: nitride materials; vapour deposition; atomic scale structure; NEXAFS/XANES
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 18306) publication
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Journal of Alloys and Compounds 561(2013), 87-94
DOI: 10.1016/j.jallcom.2013.01.130
Cited 30 times in Scopus
Permalink: https://www.hzdr.de/publications/Publ-18306