Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

We report on the planar waveguide fabrication in SrTiO3 crystal by using carbon ion irradiation at energy of 15 MeV. The reconstructed refractive index profile of the waveguide shows the “barrier”-like distribution. The planar waveguide supports guidance along both of the TE and TM polarizations. The near-field mode distribution of the waveguide shows reasonable agreement with the simulated modal profile. After thermal annealing treatment at 260 °C in air, the propagation loss of waveguide is reduced to as low as 0.8 dB/cm.