Corundum-type Fe-doped cathodic arc evaporated Al-Cr-O coatings

Koller, C. M.; Ramm, J.; Polcik, P.; Munnik, F.; Paulitsch, J.; Mayrhofer, P. H.

doi:10.1016/j.scriptamat.2014.10.037

Corundum-type Fe-doped cathodic arc evaporated Al-Cr-O coatings

Koller, C. M.; Ramm, J.; Polcik, P.; Munnik, F.; Paulitsch, J.; Mayrhofer, P. H.

Abstract

A quaternary alloying concept comprising the addition of 1-5 at% Fe to Al_0.7Cr_0.3 targets for cathodic arc evaporation at 550 °C is investigated regarding its influence on promoting singe-phase α-(Al,Cr)₂O₃ film growth. Based on detailed X-ray diffraction and transmission electron microscopy studies we can show that the α-phase fraction correlates with the incorporated Fe content and increases with increasing film thickness at the expense of the cubic phases.

Keywords: Corundum-type aluminium oxide; (Al; Cr)₂O₃; (Al; Cr; Fe)₂O₃; cathodic arc evaporation

Beteiligte Forschungsanlagen

Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159

Verknüpfte Publikationen

DOI: 10.17815/jlsrf-3-159 is cited by this (Id 21031) publication

Scripta Materialia 97(2015), 49-52
DOI: 10.1016/j.scriptamat.2014.10.037
Cited 24 times in Scopus

Permalink: https://www.hzdr.de/publications/Publ-21031