Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

HIM is well known for its exceptional imaging and nanofabrication capabilities. After a brief introduction of the gas field ion source and the ion microscope, I will present a wide range of results obtained with either the Twente UHV Orion+ or the NanoFab at the HZDR in Dresden. Special emphasis will be given to the use of channeling and the role of defects created by the energetic ion beam. Ionoluminescence is used to obtain information on the latter. Helium Ion Microscopy has an unprecedented surface sensitivity. Recent results obtained on thin silver layers on Pt(111) demonstrate that work function differences as small as ~20 meV as well as surface reconstructions can be visualized. Finally, some preliminary results of Neon based materials modification and cross section preparation will be presented.