Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationTop-down fabrication of silicon nanowires
Abstract
Results on top-down fabrication of silicon (Si) nanowires (Ws) towards junctionless nanowire transistors, Si NW-based biosensors and reconfigurable field effect transistors have been presented at the SENTECH "Plasma Process Technology” seminar.
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 24995) publication
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Eingeladener Vortrag (Konferenzbeitrag)
SENTECH "Plasma Process Technology” seminar, 07.04.2016, Berlin, Deutschland
Permalink: https://www.hzdr.de/publications/Publ-24995
