Helium and Neon ion based microscopy and nanofabrication
Helium and Neon ion based microscopy and nanofabrication
Hlawacek, G.
Abstract
HIM nanofabrication overview
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 26892) publication
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Vortrag (Konferenzbeitrag)
SiC workshop, 08.12.2017, Dresden, Deutschland
Permalink: https://www.hzdr.de/publications/Publ-26892
