Ultra-fast solid phase epitaxy of Mn5Ge3 on (001) Ge substrate


Ultra-fast solid phase epitaxy of Mn5Ge3 on (001) Ge substrate

Xie, Y.; Yuan, Y.; Hübner, R.; Wang, M.; Xu, C.; Grenzer, J.; Helm, M.; Zhou, S.; Prucnal, S.

Abstract

In the present work, we report on epitaxial growth of ferromagnetic Mn5Ge3 thin films on (001) Ge substrates induced by Mn in-diffusion during non-equilibrium flash lamp annealing for 20 ms. The ferromagnetic Mn5Ge3/Ge samples with very sharp interface between the Mn5Ge3 layer and the Ge substrate can be used to fabricate spintronic devices. Temperature-dependent magnetization reveals a Curie temperature of 282 K which can be tuned much above room temperature by strain engineering and/or co-doping with C. The microstructural properties of the fabricated films were investigated by X-ray diffraction, cross-sectional TEM and Rutherford backscattering spectrometry. Both used material and technology are highly compatible with complementary metal-oxide-semiconductor (CMOS) technology and can be used for spintronics.

Keywords: Epitaxial growth; ferromagnetic; flash lamp annealing

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