Compositional analysis and in-situ experiments in the HIM

The HIM is well known for its imaging with spot sizes below 0.5 nm, its nano-fabrication capabilities, the small energy spread of less than 1 eV and the extremely high brightness. However, it still suffers from the lack of instruments for in-situ studies as well as capabilities for a well integrated material analysis. In the first part a plug and socket system for sample holders will be shown with up to six freely customizable high-voltage electrical connections Additionally time-of flight spectrometry has been implemented for compositional analysis [1]. New results, drawbacks and derive conclusions for the practical use of time-of-flight SIMS will be presented [2]. Our setup delivers a mass resolution delta m < 0.3 u (for m/q < 80 u) and a lateral resolution of 8 nm.

[1] N. Klingner, R. Heller, G. Hlawacek, J. von Borany, J.A. Notte, J. Huang, S. Facsko. Ultramicroscopy 162 (2016), pp 91-97
[2] N. Klingner, R. Heller, G. Hlawacek, S. Facsko, J. von Borany (2018), submitted