HeFIB 2018: Helium and emerging focused ion beams

Gas field ion sources (GFIS) using helium and neon as ion species are new and rapidly growing ion beam techniques.
However, GFIS based focused ion beams (FIB) are not the only new ion beam techniques offering new capabilities that go
beyond what classic Ga based FIB can do. Based on the contributions to the recently held meeting on Helium and
Emerging Focused Ion Beams (HeFIB) I will report on the newest developments in this field.
I will try to highlight new technological developments in the field of GFIS based FIBs, but also present new and emerging
alternative FIB source techniques such as Laser cooled sources, liquid metal alloy source, or Xe plasma FIBs. However,
such new techniques also open up many new application fields. I will present selected examples of in which focused ion
beams have been used for imaging, localized materials modification as well as classical FIB based fabrication of nano-
structures.