In-situ experiments and characterization in the Helium Ion Microscope
In-situ experiments and characterization in the Helium Ion Microscope
Abstract
In-situ experiments in the HIM
Keywords: HIM
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 30526) publication
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Eingeladener Vortrag (Konferenzbeitrag)
Ion beams for future technologies 2019, 2.4.2019, Dubrovnik, Kroatien
Permalink: https://www.hzdr.de/publications/Publ-30526
