RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"
RBS Raw data for publication: ""Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"
Mientus, R.; Weise, M.; Seeger, S.; Heller, R.; Ellmer, K.
Abstract
Raw data for pub. "Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC and RF Magnetron Sputtering: A Systematic Study of the Influence of the Type of the Reactive Gas"
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 31840) publication
- DOI: 10.3390/coatings10030204 references this (Id 31840) publication
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Electrical and Optical Properties of Amorphous SnO2:Ta Films, Prepared by DC …
ROBIS: 31838 has used this (Id 31840) publication of HZDR-primary research data
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Forschungsdaten im HZDR-Daten-Repositorium RODARE
Publication date: 2020-02-26 Open access
DOI: 10.14278/rodare.647
Versions: 10.14278/rodare.648
License: CC-BY-4.0
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Permalink: https://www.hzdr.de/publications/Publ-31840