Helium Ion Microscope based nanofabrication
Helium Ion Microscope based nanofabrication
Abstract
Helium Ion Microscope based nanofabrication
Keywords: HIM; nanofabrication; GFIS
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 32230) publication
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Sonstiger Vortrag
(Online Präsentation)
Nanofabrication webinar series @ Master on Advanced Nanoscience and Nanotechnology, 23.04.2020, Barcelona, Spain -
Sonstiger Vortrag
(Online Präsentation)
Webinar series on Advances Nanofabrication, 26.02.-9.4.2021, Barcelona, Spanien
Permalink: https://www.hzdr.de/publications/Publ-32230
