Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Broad ion beams have shown their wide applications for materials modification. Focused ion beams can be used in a similar way while simultaneously providing process monitoring. Here, we demonstrate this on a new kind of ion-induced structural evolution.

Sub-micrometer Sn spheres were irradiated in a helium ion microscope with a sub-nm beam of 30 keV He ions. Above a fluence of ~10^17/cm², Sn extrusions appeared on the surface of the spheres, which were imaged using the secondary electron signal. Initially, small, pyramid-like faceted extrusions form at the equator of the spheres (north pole pointing to the ion source). Later, each sphere becomes completely covered by the extrusions.

A model was developed that assumes that each He ion generate ~70 Frenkel pairs. The implanted helium atoms, interstitials, and vacancies will be confined by the oxide skin of the spheres. Some He atoms will occupy vacancies, which partially prevent their recombination with interstitials. Furthermore, the ion irradiation leads to erosion and opening of the SnO skin. The interstitials can now escape from the interior of the Sn sphere and form an epitaxial regular Sn lattice on the exterior.

Transmission electron microscopy, Auger electron spectroscopy as well as TRI3DYN [1] and 3D kinetic lattice Monte Carlo [2] simulations support these findings.

In addition, we provide a perspective on focused ion beams from our in-house development and production of liquid metal alloy ion sources, which can be used for applications from self-organized patterning, over altering magnetic or electrical properties, to quantum photonics and computation [3].

[1] Möller, Nucl. Instr. Meth. B 322 (2014) 23
[2] Strobel et al., Phys. Rev. B 64 (2001) 245422
[3] www.hzdr.de/fib