Plasma Immersion Ion Implantation as a simple Method of Ion Implantation into Metals
Plasma Immersion Ion Implantation as a simple Method of Ion Implantation into Metals
Brutscher, J.; Günzel, R.
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Vortrag (Konferenzbeitrag)
AMPT '95
Permalink: https://www.hzdr.de/publications/Publ-375