A two magnetron sputter deposition chamber for in situ observation of thin film growth by synchrotron radiation scattering

The design of a sputter deposition chamber for the in situ study of film growth by synchrotron x-ray diffraction and reflectivity is reported. Four x-ray windows, sealed with low cost, non-hazardous Kapton, enable scattering both in the horizontal as well as in the vertical scattering planes. The chamber fits into a standard six-circle goniometer from Huber which is relatively widespread in synchrotron laboratories. Two miniature magnetrons and additional gas inlets allow for the deposition of compound films or multilayers. Substrate heating up to 650°C and different substrate bias voltage are possible. The performance of the chamber was tested with the deposition of high quality TiN films of different thicknesses.