Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationApplications of unconventional focused ion beams in quantum and semiconductor technology
Abstract
Applications of unconventional focused ion beams in
quantum and semiconductor technology
Keywords: FIB
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 38688) publication
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Sonstiger Vortrag
Institutsseminar, 10.05.2023, Leipzig, Deutschland
Permalink: https://www.hzdr.de/publications/Publ-38688