Laterally resolved polymorph conversion in Ga2O3 using FIBs
Laterally resolved polymorph conversion in Ga2O3 using FIBs
Bektas, U.; Klingner, N.; Hübner, R.; Chekhonin, P.; Liedke, M. O.; Hlawacek, G.
Abstract
Laterally resolved polymoprh conversion in Galliumoxide
using Focused Ion Beams
Keywords: FIB
Beteiligte Forschungsanlagen
- Ionenstrahlzentrum DOI: 10.17815/jlsrf-3-159
Verknüpfte Publikationen
- DOI: 10.17815/jlsrf-3-159 is cited by this (Id 38690) publication
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Vortrag (Konferenzbeitrag)
(Online Präsentation)
Defect Engineering in SiC and Other Wide Bandgap Semiconductor, 22.-24.10.2023, Erlangen, Shenzen, Deutschaldn, China
Permalink: https://www.hzdr.de/publications/Publ-38690
