Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationPartial Oxidation of Implanted Si by Humidity Penetrated into Damaged SiO2 Substrates
Müller, T.; Heinig, K.-H.; Schmidt, B.
Abstract
[no abstract available]
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Sonstiger Vortrag
Project Meeting, EU Growth Project "Nanoparticules for Electronics" (NEON), Toulouse, 3-6 December, 2002
Permalink: https://www.hzdr.de/publications/Publ-5170