Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

1 Publikation

Partial Oxidation of Implanted Si by Humidity Penetrated into Damaged SiO2 Substrates

Müller, T.; Heinig, K.-H.; Schmidt, B.

Abstract

[no abstract available]

  • Sonstiger Vortrag
    Project Meeting, EU Growth Project "Nanoparticules for Electronics" (NEON), Toulouse, 3-6 December, 2002

Permalink: https://www.hzdr.de/publications/Publ-5170