Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationPlasma source ion implantation of oxygen and nitrogen in aluminum
Günzel, R.; Wieser, E.; Richter, E.; Steffen, H. J.
- Journal of Vacuum Science and Technology Part B 12 (1994) 2
Permalink: https://www.hzdr.de/publications/Publ-593