Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

This reports on an extensive study of the characteristics of AuGe and AuGeSi liquid metal alloy ion sources as a model system for new semiconductor compatible FIB sources. Such characteristics include ion beam mass spectra. A careful investigation has been undertaken where the emitter temperature is the main variable parameter. This work concerns the temperature dependence of the mass spectra of two needle-type liquid metal alloy ion sources (LMAISs), namely Au77Ge14Si9 (Tm=364°C) and Au73Ge27 (Tm=365°C). The sources are importan for producing SiGe layers. The experimental results, in conjunction with existing theories, strongly points towards the co-existance of twomechanisms for the emission of doubly-charged monomer ions: direct field-evaporation and post-ionisation.