Reactive ion plasma immersion implantation for surface passivation

Möller, W.; Shevchenko, N.; Yankov, R. A.; Rogozin, A.; Maitz, M. F.; Richter, E.; Donchev, A.; Schütze, M.

Abstract

no abstract available

Eingeladener Vortrag (Konferenzbeitrag)
8th International Workshop on Plasma-Based Ion Implantation and Deposition, 18.-22.09.05, Chengdu, China

Permalink: https://www.hzdr.de/publications/Publ-8298