Nitrogen Plasma Íon Implantation of Al Alloy in the High Voltage Glow Discharge Mode


Nitrogen Plasma Íon Implantation of Al Alloy in the High Voltage Glow Discharge Mode

Oliveira, R. M.; Ueda, M.; Rossi, J. O.; Reuther, H.; Lepienski, C. M.; Beloto, A. F.

Abstract

Nitrogen Plasma Íon Implantation of Al Alloy in the High Voltage Glow Discharge Mode

  • Vortrag (Konferenzbeitrag)
    International Conference on Íon Implantation Technology, 11.-16.06.2006, Marseille, France

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