Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

Electrical and optical characterisation of double SIMOX structures formed by sequential high energy oxygen implantation into silicon

Hatzopoulos, N.; Panknin, D.; Fukarek, W.; Skorupa, W.; Siapkas, D. I.; Hemment, P. L. F.

• Microelectronic Engineering 28 (1995) pp.415-418
  DOI: 10.1016/0167-9317(95)00087-O

Permalink: https://www.hzdr.de/publications/Publ-894